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Expired European patentEurope

Thermo-mechanical overlay signature tuning for photolithographic mask aligner

EP 0145902 B1 · Applicant: International Business Machines Corporation

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed October 26, 1984 and granted January 27, 1988. A European patent lasts at most 20 years from filing, so its term ended October 26, 2004.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by April 26, 2010.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledOctober 26, 1984
PublishedJune 26, 1985
GrantedJanuary 27, 1988
Term endedOctober 26, 2004
Application numberEP 84112873
Classification (CPC)G03F7/70233 +2 more

Timeline

Timeline From EPO dates

1985198719891991199319951997199920012003Application filedOct 26, 1984PublishedJune 26, 1985Patent grantedJan 27, 1988Term endedOct 26, 2004

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.