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European application, no grantEurope

Reactive ion etching apparatus

EP 0140975 A1 · Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed March 19, 1984 and never granted as a European patent. Had it been granted, its 20-year term would have ended March 19, 2004.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by September 19, 2009.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledMarch 19, 1984
PublishedMay 15, 1985
GrantedNever granted
Term endedMarch 19, 2004
Application numberEP 84901223
Classification (CPC)H01J37/32082 +2 more

Timeline

Timeline From EPO dates

1985198719891991199319951997199920012003Application filedMarch 19, 1984PublishedMay 15, 1985Term endedMarch 19, 2004

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

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