Expired European patentEurope
Process for the production of dimensional stable structures with a high aspect proportion in the 1 millimicron region and below for microelectronics, and use of this process for the production of X-ray masks
EP 0132823 B1 · Applicant: SIEMENS AKTIENGESELLSCHAFT
Overview
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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed July 23, 1984 and granted September 28, 1988. A European patent lasts at most 20 years from filing, so its term ended July 23, 2004.
- A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by January 23, 2010.
- We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledJuly 23, 1984
PublishedFebruary 13, 1985
GrantedSeptember 28, 1988
Term endedJuly 23, 2004
Application numberEP 84108688
Classification (CPC)G03F1/22
Timeline
Timeline From EPO dates
Sources & verification
Official EPO records
Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.