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Expired European patentEurope

Method of manufacturing a mask for obtaining texturised patterns in resist layers using X-ray lithography

EP 0104685 B1 · Applicant: Philips Electronics N.V.

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Overview

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed August 31, 1983 and granted February 8, 1989. A European patent lasts at most 20 years from filing, so its term ended August 31, 2003.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by March 3, 2009.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledAugust 31, 1983
PublishedApril 4, 1984
GrantedFebruary 8, 1989
Term endedAugust 31, 2003
Application numberEP 83201242
Classification (CPC)G03F1/22

Timeline

Timeline From EPO dates

1984198619881990199219941996199820002002Application filedAug 31, 1983PublishedApril 4, 1984Patent grantedFeb 8, 1989Term endedAug 31, 2003

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.