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Expired European patentEurope

Rate and depth monitor for silicon etching

EP 0057745 B1 · Applicant: International Business Machines Corporation

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Overview

The published document from the EPO: abstract, claims, description and drawings. Open it full size

Read the whole patent

Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

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Why it's free to use

  • Filed September 16, 1981 and granted January 28, 1987. A European patent lasts at most 20 years from filing, so its term ended September 16, 2001.
  • A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by March 16, 2007.
  • We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.
FiledSeptember 16, 1981
PublishedAugust 18, 1982
GrantedJanuary 28, 1987
Term endedSeptember 16, 2001
Application numberEP 81107294
Classification (CPC)G01B11/0675

Timeline

Timeline From EPO dates

1982198419861988199019921994199619982000Application filedSep 16, 1981PublishedAug 18, 1982Patent grantedJan 28, 1987Term endedSep 16, 2001

Sources & verification

Official EPO records

Full published documentClaims, description and drawings as a PDF.EPOEuropean Patent RegisterProcedure, status, file inspection and legal events.EPOLinked open EP data recordThe bibliographic record this page is built from.EPO

Cross-check elsewhere

Google PatentsFull text, worldwide family, citing patents and legal events.patents.google.comEspacenetNational family members and their legal status.European Patent Office

Everything on this page comes from the EPO record linked above. EPO data used under CC BY 4.0.