Improved positive-working resist materials and their use in a formation of a negative resist pattern on a substrate

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Listed from its EPO record in Patent Yard's archive of European patents past their term. Its claims, description and drawings are in the EPO PDF and on Google Patents, and the Claude kit works from them.

Why it's free to use

• Filed August 27, 1980 and granted March 28, 1984. A European patent lasts at most 20 years from filing, so its term ended August 27, 2000.
• A supplementary protection certificate, which can extend a medicine or crop-protection patent, adds at most five and a half years, so even that would have ended by February 27, 2006.
• We check European rights only. A US or other national patent in its family could still be in force: check its family on Espacenet or Google Patents.