Sputtering target for producing metallic glass membrane and manufacturing method thereof
CA 2584566 C · Owner: Yamaura, Shin-Ichi · Inventors: Kimura, Hisamichi; Yamaura, Shin-Ichi; Nakamura, Atsushi
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A sputtering target for producing a metallic glass membrane characterized in comprising a structure obtained by sintering atomized powder having a composition , of a ternary compound system or greater with at least one or more metal elements , selected from Pd, Zr, Fe, Co Cu and Ni as its main component (component of greatest atomic %), and being an average grain size of 50µm or less. The prepared metallic glass membrane can be used as a substitute for conventional high-cost bulk metallic glass obtained by quenching of molten metal. This sputtering target for producing the metallic glass membrane is also free from problems such as defects in the metallic glass membrane and …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed November 4, 2005 and granted December 10, 2013. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended November 4, 2025.
- Certificates of supplementary protection extend only drug patents, and it isn't classified as one.
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Timeline
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.