Substrate transfer device for thin-film deposition apparatus
CA 2524482 C · Owner: Hasegawa, Noriaki · Inventors: Hasegawa, Noriaki; Yamasaki, Shusaku
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Disclosed is a substrate transfer device for a thinfilm deposition apparatus. In order to positively prevent plasma generated by electrodes (3) from coming into a rear surface of the substrate (4) and to attain cost reduction and improvement in maintenance without providing a mask panel (35) in a deposition chamber (1) with which the whole outer peripheral edge of the substrates (4) is masked, partition panels (37) each with an opening (36) larger than substrate (4) and facing the electrode (3) are arranged on a transfer carriage (23), a picture-frame-like substrate holder (38) with the substrate (4) fitted thereto being arranged on a side of the partition panel away from the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed April 30, 2004 and granted January 3, 2012. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended April 30, 2024.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by April 30, 2026.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.