Temperature compensation for silicon mems resonator
CA 2513976 C · Owner: Partridge, Aaron · Inventors: Partridge, Aaron; Lutz, Markus
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Thermally induced frequency variations in a micromechanical resonator are actively or passively mitigated by application of a compensating stiffness or , a compressive/tensile strain. Various composition materials may be selected according to their thermal expansion coefficient and used to form resonator components on a substrate. When exposed to temperature variations the , relative expansion of these composition materials creates a compensating stiffness, or a compressive/tensile strain.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 30, 2004 and granted April 16, 2013. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended March 30, 2024.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by March 30, 2026.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.