Method for manufacturing polymer microstructures and polymer waveguides
CA 2500671 A1 · Owner: Lumera Corporation · Inventors: Bintz, Louis J.; Kressbach, Jeffrey K.; Dinu, Raluca
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A microfabrication process for preparing articles such as optical waveguides in which a precursor article that includes (a) a substrate (b) a first , polymer layer overlying the substrate (c) a second polymer layer overlying , the first polymer layer (d) a metal hardmask layer overlying the second polymer layer, and (e) a photodefinable layer overlying the metal hardmask layer is subjected to photolithographic imaging developing, and plasma , etching steps to form an article that includes the substrate and portions of the first polymer layer arranged in a pattern corresponding to the pattern of the photomask used for photolithographic imaging.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 29, 2003. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended September 29, 2023.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 29, 2025.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.