Controlling electromechanical behavior of structures within a microelectromechanical systems device
CA 2499208 C · Owner: Qualcomm Mems Technologies, Inc. · Inventors: Miles, Mark W.; Kothari, Manish; Batey, John
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
In one embodiment, the invention provides a method for fabricating a microelectromechanical system device. The method comprises fabricating a first layer (14) comprising a film (14) having a characteristic electromechanical response, and a characteristic optical response wherein the characteristic , optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer (14) by at least reducing charge build up thereon during activation of the microelectromechanical systems device.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 18, 2003 and granted July 30, 2013. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended September 18, 2023.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 18, 2025.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.