Method for selectively covering a micro machined surface
CA 2498669 C · Owner: Disegna, Irma · Inventors: Conta, Renato; Disegna, Irma
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
On a die that has etchings on a surface firstly a sheet of negative , photoresist is laid down which by means of an , exposure and subsequent development is left only above the etchings; then, upon the negative photoresist a positive photoresist is , applied, which is subjected to exposure and development to produce functional geometries deposited in thin film; subsequently the positive photoresist is removed in a "lift-off' operation and the negative , photoresist is taken off in a plasma operation thus revealing , the etchings.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 11, 2003 and granted February 19, 2013. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended September 11, 2023.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 11, 2025.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.