A device for epitaxially growing objects by cvd
CA 2440366 A1 · Owner: Liu, Yuijing · Inventors: Zhou, Gang; Liu, Yuijing; Lofgren, Peter
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A device for epitaxially growing objects by Chemical Vapour Deposition on substrates (13) comprises a casing (2) defining a room (5) for receiving a holder (11) carrying a plurality of substrates and adapted to be rotated about a substantially vertical axis as well as means for rotating said holder during the growth. The device has also means (10) for feeding a gas mixture for the growth into said room through an inlet (9) being directed substantially along said vertical axis and means (15) for heating said gas mixture inside said room for decomposition thereof and depositing of articles so formed on the substrate for growing layers thereon in a substantially vertical direction for …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 22, 2002. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended March 22, 2022.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by March 22, 2024.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.