On-the-fly beam path error correction for memory link processing
CA 2438566 A1 · Owner: Bruland, Kelly · Inventors: Lo, Ho Wai; Unrath, Mark; Swaringen, Stephen
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Laser beam positioners (Figure 12, 340 236, 260, 262, 302, 304, 310, 312, 316 318, 320, 322, 324, 326, 328, 330, 336 342) employ a steering mirror , that performs small-angle deflection of a laser beam to compensate for crossaxis setting errors of a positioner stage. A two-axis mirror is preferred because either axis of the positioner stages may be used for performing work. In one embodiment, the steering mirror is used for error correction only without necessarily requiring coordination with the positioner stage position commands. A fast steering mirror employing a flexure mechanism and piezoelectric actuators to tip and tilt the mirror is preferred in semiconductor link processing …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed February 15, 2002. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended February 15, 2022.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by February 15, 2024.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.