Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
CA 2437817 A1 · Owner: Valette, Serge · Inventors: Valette, Serge
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The invention concerns a method for making an optical micromirror comprising a fixed part a mobile part, with reflecting means, linked to the fixed part by articulating means. Said method is characterised in that it comprises the following steps: a) producing a stack consisting of a mechanical support (21) a first layer (22) of thermal oxidation material and at least a second layer (26) of material designed to constitute the mobile part; b) providing articulation means (27); c) producing reflecting means (29) on the second layer; d) producing the mobile part by etching at least the second layer of material; e) eliminating the thermal oxidation layer to release said mobile part. The …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed February 13, 2002. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended February 13, 2022.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by February 13, 2024.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.