Planarizers for spin etch planarization of electronic components and methods of use thereof
CA 2432012 A1 · Owner: Mukherjee, Shyama · Inventors: Debear, Donald; Mukherjee, Shyama; Levert, Joseph
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An electronic component contemplated comprises a substrate layer (110) a , dielectric layer (120) coupled to the substrate layer (110) a barrier layer , (130) coupled to the dielectric layer (120) a conductive layer (140) coupled , to the barrier layer (130) and a protective layer (150) coupled to the conductive layer (140). A method of making the electronic component comprises the steps of providing a substrate (110) coupling a dielectric layer (120) to the substrate (110), coupling a barrier layer (130) to the dielectric layer (120), coupling a conductive layer (140) to the barrier layer (130) and , coupling a protective layer (150) to the conductive layer (140). A method of …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed January 22, 2002. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended January 22, 2022.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by January 22, 2024.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.