Electromigration early failure distribution in submicron interconnects
CA 2406371 A1 · Owner: Ho, Paul S. · Inventors: Ho, Paul S.; Gall, Martin
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A test structure and a method for detecting early failures in a large ensemble of semiconductor elements, particularly applicable to on-chip interconnects is provided. A novel approach to gain information about the statistical behavior of several thousand interconnects and to investigate possible deviations from perfect lognormal statistics is presented. A test structure having a Wheatstone Bridge arrangement and arrays of several hundred interconnects may be used to prove that failure data does not deviate from lognormal behavior down to a cumulative failure rate of approximately one out of 20,000. Typical test structure sizes may therefore, be extended far beyond , standard test …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed April 17, 2001. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended April 17, 2021.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by April 17, 2023.
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Timeline
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.