Semiconductor processing apparatus and electrode member therefor
CA 2404582 A1 · Owner: Natsuhara, Masuhiro · Inventors: Nakata, Hirohiko; Kuibira, Akira; Natsuhara, Masuhiro
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The present invention is directed to a semiconductor processing apparatus having an oxidation-free electrode member for power supply. An electrode member (11) is used for supplying electricity from an external power source to a susceptor (1), which is heated so as to heat a wafer loaded thereon. The electrode member (11) has a thermal expansion coefficient in the range of 3.0 x, 10-6 /K to 8.0 x 10-6 /K at a temperature from room temperature to 500°C, electric resistance of 10-3 .OMEGA. cm or less at room temperature. The weight increase due to oxidation is equal to or less than 0.1% / hour at 500°C in the, atmosphere.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 23, 2002. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended September 23, 2022.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 23, 2024.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.