Method for producing a grid structure, an optical element, an evanescence field sensor plate, a microtitre plate and an optical communication engineering coupler as well as a device for monitoring a wavelength
CA 2399651 A1 · Owner: Maisenholder, Bernd · Inventors: Duveneck, Gert; Heine, Claus; Edlinger, Johannes
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The aim of the invention is to produce a coupling grid that is designed as a line grid having a grid period between 100 nm and 2,500 nm. A substrate (1) is covered with a photosensitive resist layer (10) and is exposed by means of a mercury discharge lamp (11) via a deviation mirror (13 13') and through a , phase mask (14) and approximately under the Littrow angle (.THETA.L) or 0~. Said layer is arranged in the near field of the phase mask. Said substrate is then structured by means of reactive ion etching and is provided with a transparent layer by means of reactive DC magnetron sputtering especially , pulsed DC sputtering or AC superimposed DC sputtering. The phase mask (14) has …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed January 26, 2001. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended January 26, 2021.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by January 26, 2023.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.