Device for forming nanostructures on the surface of a semiconductor wafer by means of ion beams
CA 2382984 A1 · Owner: Kibalov, Dmitry Stanislavovich · Inventors: Kibalov, Dmitry Stanislavovich; Smirnov, Valery Konstantinovich
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The invention relates to electronic and vacuum technology in particular to , devices for forming various structures and coatings on semiconductor wafers and can be used for developing new generation semiconductor items. Said invention makes it possible to develop the devices for producing nanostructures which are used for manufacturing the semiconductor items having high-scale integration, and also high resolution optical instruments. The inventive device comprises a vacuum chamber provided with a pumping and annealing system, a unit for introducing the semiconductor wafers into the chamber, a controllable energy ion source a mass-separator, an electron , detector a holder for the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed July 2, 2001. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended July 2, 2021.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by July 2, 2023.
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Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.