Narrow band gas discharge laser with gas additive
CA 2377832 A1 · Owner: Besaucele, Herve A. · Inventors: Hofmann, Thomas; Ishihara, Toshihiko; Besaucele, Herve A.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The present invention provides a very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and repoducibility. Very small quantities of a stabilizing additive consisting of oxygen or a heavy noble gas (xenon or radon for KrF lasers, or krypton, xenon or radon for ArF lasers) are added to the , gas mixture. Tests performed show substantial improvements in energy stability with the addition of about 30 ppm of xenon to a KrF laser. Tests show improved performance for the ArF Lasers with the addition of about 6-10 ppm of Xe or 40 ppm of Kr. In a preferred embodiment, very narrow bandwidth is achieved …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed June 29, 2000. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended June 29, 2020.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by June 29, 2022.
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Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.