Micro-electromechanical devices and methods of manufacture
CA 2377189 A1 · Owner: Regents Of The University Of Minnesota · Inventors: Schiller, Peter J.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Micro-electromechanical devices, substrate assemblies from which the devices can be manufactured, and methods to manufacture the devices are disclosed. The invention combines the advantages of conventional surface and bulk micromachining processes using a sacrificial layer to create an integrated micro-electromechanical system (MEMS) technology that provides high performance, high yield, and manufacturing tolerance. The devices manufactured according to the present invention include but are not limited to, pressure , sensors vibration sensors, accelerometers, gas or liquid pumps flow sensor, resonant devices, and infrared detectors.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed June 29, 2000. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended June 29, 2020.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by June 29, 2022.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.