Slurries of abrasive inorganic oxide particles and method for adjusting the abrasiveness of the particles
CA 2347632 A1 · Owner: W.R. Grace & Co.-Conn. · Inventors: Pryor, James Neil
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Autoclaving slurries of porous, inorganic oxide particles results in an increased abrasiveness of the particles as reflected in increased removal rates of a polished substrate at standard polishing conditions in chemical mechanical polishing operations. Slurries having novel abrasion properties especially for silica-based slurries, are created. The increase in particle abrasivity strongly correlates with a decrease in particle surface area as determined by N2 adsorption (BET method). As a result methods for obtaining a , desired abrasivity for a slurry can be practiced by heating a slurry of inorganic oxide particles to a BET surface area previously identified as associated with the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed October 21, 1999. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended October 21, 2019.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by October 21, 2021.
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Timeline
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Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.