Electrostatic sensing chuck using area matched electrodes
CA 2346240 A1 · Owner: Delsys Pharmaceutical Corporation · Inventors: Mcginn, Joseph T.; Desai, Nitin V.; Ludington, David N.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode the , electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (Ea) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed October 14, 1999. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended October 14, 2019.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by October 14, 2021.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.