Microelectromechanical actuators including driven arched beams for mechanical advantage

Abstract From the Canadian patent

Microelectromechanical actuators include a substrate spaced apart supports on , the, substrate and a thermal arched beam that extends between the spaced apart supports and that, further arches upon heating thereof for movement along the substrate. One or more driven, arched beams are coupled to the thermal arched beam. The end portions of the driven, arched beams move relative to one another to change the arching of the driven arched beams, in response to the further arching of the thermal arched beam for movement of , the driven, arched beams. A driven arched beam also includes an actuated element at an intermediate, portion thereof between the end portions wherein a respective …