Micromechanical sensor and method for producing same
CA 2340059 C · Owner: Bever, Thomas · Inventors: Aigner, Robert; Bever, Thomas; Timme, Hans-Jorg
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The invention relates to a micromechanical sensor and to a corresponding production method, comprising the following steps: a) preparing a doped semiconductor wafer (4); b) applying an epitaxial layer (1) that is doped in such a way that a jump in the charge carrier density in the interface (11) between the semiconductor wafer and the epitaxial layer occurs; c) optionally etching ventilation holes (2) traversing the epitaxial layer and optionally filling the ventilation holes with a sacrificial material; d) depositing at least one sacrificial layer (9), at least one spacing layer (10) a membrane , (5) and optionally a semiconductor circuit (8) on the top side of the epitaxial layer …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed August 3, 1999 and granted December 23, 2003. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended August 3, 2019.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by August 3, 2021.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.