High throughput organometallic vapor phase epitaxy (omvpe) apparatus
CA 2334349 A1 · Owner: Cornell Research Foundation, Inc. · Inventors: Shealy, J. Richard
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A cold wall reactor (10) having inner (14) and outer (12) walls defining an annular reactor cell (16). A susceptor (52) is rotatably mounted in the cell (16), and received wafers (53) to be treated by gases flowing axially through the cell (16). The outer wall (10) of the reactor is normally cooled but is , heated by a suitable furnace (210) to provide a hot wall reactor when cleaning of the cell (16) is required.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed July 12, 1999. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended July 12, 2019.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by July 12, 2021.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.