Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods

Abstract From the Canadian patent

A micromechanical system can include a substrate an actuator, and an actuated, element. In particular the actuator can include a serpentine arrangement of alternating, actuating and opposing segments anchored at a first end thereof to the substrate wherein, the actuating segments deflect in response to actuation thereof so that a second end of the, serpentine arrangement moves relative to the substrate upon deflection of the actuating, segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection, of the actuating segments. Related methods and actuators are also discussed.