In-plane mems thermal actuator and associated fabrication methods
CA 2317246 A1 · Owner: Hill, Edward · Inventors: Cowen, Allen; Hill, Edward; Dhuler, Vijayakumar R.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the, MEMS thermal actuator of the present invention may provide for a self contained heating, mechanism that allows for the thermal actuator to be actuated using lower power, consumption and lower operating temperatures. The MEMS thermal actuator includes a, microelectronic substrate having a first surface and at least one anchor structure affixed, to the first surface. A composite beam extends from the anchor(s) and overlies the first, surface of the substrate. The composite beam is adapted for thermal actuation such …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 1, 2000. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended September 1, 2020.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 1, 2022.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.