Spin coating method and apparatus for liquid carbon dioxide systems
CA 2315225 A1 · Owner: Carbonell, Ruben G. · Inventors: Carbonell, Ruben G.; Desimone, Joseph M.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A spin coating method comprises applying a carbon dioxide liquid to surface portion of a substrate (12); and then rotating the substrate (12) about an axis to distribute the carbon dioxide liquid on the substrate (12). The carbon dioxide liquid can be distributed on the substrate (12) as a carrier for the , purpose of depositing a material such as a coating on the substrate (12). In addition, the carbon dioxide liquid can be distributed on the substrate (12) as a solvent, for the purpose of solubilizing dissolving or removing a , material previously deposited on the surface of the substrate (12). Apparatus (10) for carrying out the present invention is also disclosed.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed November 24, 1998. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended November 24, 2018.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by November 24, 2020.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.