Thin film resonator apparatus and method of making same
CA 2314375 C · Owner: Pfeiffer, Loren, Neil · Inventors: Wong, Yiu-Huen; West, Kenneth William; Pfeiffer, Loren, Neil
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A thin film resonator (TFR) is produced with an improved piezoelectric film which is epitaxially grown on a growing surface resulting in a piezoelectric film with less grain boundaries. Epitaxial growth refers to the piezoelectric film having a crystallographic orientation taken from or emulating the crystallographic orientation of a single crystal substrate or growing surface. For example by epitaxially growing a piezoelectric film on a single crystal silicon substrate as the growing surface an improved piezoelectric film is produced with little or no grain boundaries. In accordance with another aspect of the present invention a method of making a TFR is disclosed in which the …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed July 24, 2000 and granted November 18, 2003. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended July 24, 2020.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by July 24, 2022.
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Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.