Reflective fly's eye condenser for euv lithography
CA 2296899 A1 · Owner: Kunick, Joseph M. · Inventors: Koch, Donald G.; Kunick, Joseph M.; Mcguire, James P.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An illumination source or condenser (10) used to project the image of a reticle (24) onto a photosensitive substrate (28) used in photolithography having a first reflective fly's eye faceted, mirror, or mirror array (16) with predeterminedly positioned facets or elements (42) and a second reflective fly's eye faceted mirror, or mirror array having predeterminedly positioned facets or elements (52) for creating a desired radiant intensity pupil fill, or angular distribution. A source (12) of extreme ultraviolet electromagnetic radiation is provided to a first fly's eye or mirror array (16) with arcuate shaped facets or elements (42). The arcuate shaped facets or elements (42) are positioned …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed January 25, 2000. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended January 25, 2020.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by January 25, 2022.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.