Gas injection disc assembly for cvd applications
CA 2295180 C · Owner: Saint-Gobain Industrial Ceramics, Inc. · Inventors: Raney, Daniel V.; Heuser, Michael Scott; Quirk, George
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A gas injection disc is provided which includes an outer ring and a tubular modular insert which slips into the outer ring. The outer ring is provided with an inner bore, a ring-shaped plenum located around the inner bore an , outer gas sealing surface around the plenum and two gas feed paths extending , from the periphery of the outer ring to the plenum. The gas feed paths are each provided with a gas feed attachment for coupling gas supply tubes thereto. The insert is provided with a plurality of radially aligned injectant holes, an inner gas sealing surface, and an axial bore. The insert is seated in the inner bore of the outer ring such that the inner and outer gas sealing …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed June 22, 1998 and granted November 4, 2003. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended June 22, 2018.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by June 22, 2020.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.