Dynamically adjustable high resolution adjustable slit
CA 2294677 A1 · Owner: Govil, Pradeep K. · Inventors: Mccullough, Andrew W.; Galburt, Daniel N.; Callan, David
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Blades (48) pivotally attached together linked to push rods (34) and inserted into an illumination field energy or flux, (510). The blades (48; 520) extend longitudinally along the length of a rectangular illumination field or slit (510) used to image a reticle (537) onto a photosensitive substrate. The blades (48; 520) controllably adjust the width of the rectangular illumination field (510) to modify the illumination intensity or energy provided to a photosensitive substrate. The illumination field (510) is scanned across the photosensitive substrate (560) to expose it with the image of a reticle (537). The blades (48; 520) are dynamically controlled (541) during the scanning exposure to …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed January 6, 2000. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended January 6, 2020.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by January 6, 2022.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.