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Annealing of a crystalline perovskite ferroelectric cell and cells exhibiting improved barrier properties

CA 2290370 A1 · Owner: Ramesh, Ramamoorthy · Inventors: Dhote, Anil M.; Ramesh, Ramamoorthy; Aggarwal, Sanjeev

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Abstract From the Canadian patent

A method of fabricating a ferroelectric capacitor usable as a memory cell in a non-volatile integrated circuit memory integrated on a silicon substrate (22) preferably including an intermetallic barrier layer. The memory cell consists of a ferroelectric layer (50), for example of lead niobium zirconium titanate (PNZT) sandwiched between metal oxide electrodes (52 and 46) for example of , lanthanum strontium cobalite (LSCO) which forms with a crystalline , orientation and provides a growth template for the crystalline formation of the ferroelectric. The intermetallic layer (44) prevents diffusion of oxygen from the bottom LSCO electrode (46) down to the underlying silicon (40). At …

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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.

Why it's free to use

  • Filed June 8, 1998. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended June 8, 2018.
  • A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by June 8, 2020.
  • We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
FiledJune 8, 1998
GrantedNo grant recorded
Term endedJune 8, 2018
Patent numberCA 2290370 A1
Classification (IPC)H01L29/78 +2 more

Timeline

Timeline From CIPO dates

1999200120032005200720092011201320152017Application filedJune 8, 1998Term endedJune 8, 2018

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Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.