Method and apparatus to produce large inductive plasma for plasma processing
CA 2279229 C · Owner: Ernst, Roland · Inventors: Ernst, Roland; Rossi, Francois; Daviet, Jean-Francois
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The apparatus (12) generates a time-varying magnetic field through a field admission window (22) of plasma processing chamber (10) to create or sustain a plasma within the chamber by inductive coupling. It comprises: a magnetic core (26; 260) presenting a unipolar pole face structure (26a; 260a) adapted to be applied against or in proximity to the window and having an active field emission area whose size and shape substantially matches the field admission window, and an inductor means (28) associated with the magnetic core for , generating a substantially uniformly distributed time-varying magnetic field throughout the unipolar pole face structure. The apparatus can be formed as an …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed October 7, 1998 and granted February 4, 2003. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended October 7, 2018.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by October 7, 2020.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
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Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.