Magnetron sputtering gun
CA 2273294 A1 · Owner: Robinson, James Edward · Inventors: Robinson, James Edward
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A magnetron sputtering gun for coating a substrate with a thin coating under vacuum. The magnetron sputtering gun has a chamber having means to generate a magnetic field therein and means to effect sputtering from a target to said substrate to be coated. The sputtering gun has metal-metal seals, formed using copper gaskets at the vacuum sealing surfaces preferably with the target is clamped to an upper plate that is vacuum brazed in position e.g. to a standard Conflat flange. The cooling water in the magnetron is separated from magnets that generate the magnetic field to, isolate said magnets from corrosive effects of the cooling water and to permit replacement thereof. The magnetron …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed May 27, 1999. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended May 27, 2019.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by May 27, 2021.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.