A method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device

Abstract From the Canadian patent

In a method of manufacturing a semiconductor optical waveguide array in an ultra-high integration the device yield per, wafer is considerably increased and uniform and improved characteristics are obtained. In this method there is, manufactured a semiconductor optical waveguide array including a plurality of optical waveguides in an array structure in stripe-shaped growth regions enclosed by dielectric thin films on a substrate. The waveguides are fabricated through a selective crystal growth process and include a semiconductor multilayer structure including a quantum well layer or a semiconductor multilayer structure including a bulk layer. Namely there is, formed a plurality of …