Gas delivery systems for particle beam processing
CA 2258649 A1 · Owner: Rathmell, Gary P. · Inventors: Casella, Robert A.; Libby, Charles J.; Rathmell, Gary P.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Apparatus and method of an improved gas delivery system for delivering reactant material to a workpiece, such as a substrate being operated on by a , particle beam employs a shroud-type concentrator having an interior axial passage. Fluid reactant material is supplied to the axial passage for delivery to the workpiece. A particle beam can traverse the axial passage for impingement on the workpiece surface, concurrently if desired with the reactant delivery.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed May 28, 1997. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended May 28, 2017.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by May 28, 2019.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.