Vacuum treatment system for depositing thin coatings
CA 2234351 C · Owner: Leybold Systems Gmbh · Inventors: Beul, Johannes; Kunkel, Stefan; Schussler, Hans
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
In a vacuum treatment system for depositing thin coatings on substrates(36 through 38) with several stationary treating chambers (8 through 11) that are held by the annular or frame-like side wall (3) of the vacuum chamber (2) and display the treatment tools (41 42,...), and with treatment, chamber openings (4 through 7) aligned peripherally inward on the center of the vacuum chamber (2) and extending in planes parallel to each other, a shaft (14), extending parallel to the opening planes and mounted in the vacuum chamber lid and/or in the vacuum chamber bottom plate (12) of the vacuum chamber (2) is provided that moves the, plates (23 through 26) for closing the treatment chamber openings …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed April 8, 1998 and granted February 5, 2002. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended April 8, 2018.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by April 8, 2020.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.