Thermal processor for semiconductor wafers
CA 2216464 A1 · Owner: General Electric Company · Inventors: Page, Timothy Dietrich; Gorczyca, Thomas Bert; Ghezzo, Mario
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A thermal processor for at least one semiconductor wafer includes a reactor chamber having a material substantially transparent to light including a wavelength within the range of about 200 nanometers to about 800 nanometers for holding the at least one semiconductor wafer. A coating including a material substantially reflective of infrared radiation can be present on at least a portion of the reactor chamber. A light source provides radiant energy to the at least one semiconductor wafer through the coating and the reactor chamber. The light source can include an ultraviolet discharge lamp a halogen, infrared incandescent lamp, or a mental halide visible discharge lamp. The coating can be …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed September 25, 1997. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended September 25, 2017.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by September 25, 2019.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.