Method and apparatus for ion beam transport
CA 2193709 C · Owner: Axcelis Technologies, Inc. · Inventors: Horsky, Thomas N.; Reynolds, William E.; Chen, Jiong
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Method and apparatus for maintaining an ion beam along a beam path from an ion source to an ion implantation station where workpieces are treated with the ion beam. A beam neutralizer is positioned upstream from the beam implantation station and injects neutralizing electrons into the ion beam. A magnetic field is created upstream from the position of the beam neutralizer for inhibiting upstream movement of neutralizing electrons. A disclosed technique for setting up the magnetic field for inhibiting electron movement is with spaced apart first and second permanent magnets.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 20, 1996 and granted February 5, 2002. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended December 20, 2016.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by December 20, 2018.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.