Wavelength-stabilized narrow band excimer laser
CA 2192415 C · Owner: Nec Corporation · Inventors: Tada, Akifumi
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
The present invention provides a wavelength-stabilized narrow band excimer laser device which has a discharge tube a cavity formed of both an, output mirror at a front side and a total reflection mirror at a rear side and a, wavelength selective element positioned between the front and rear mirrors wherein the output mirror, the total reflection mirror and the wavelength selective element are securely fixed on a supporting structure which is mounted via a vibration removing device over a mount on which the discharge tube is mounted so that the output mirror the total reflection mirrorand the wavelength selective element are free from any vibration of the discharge tube. The wavelength …
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 9, 1996 and granted September 17, 2002. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended December 9, 2016.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by December 9, 2018.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.