Electrode structure and method for anodically-bonded capacitive sensors
CA 2185532 C · Owner: Warren, Keith O. · Inventors: Warren, Keith O.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A sensing electrode (24, 26) on a glass layer (14 16) of an anodically-bonded capacitive sensor (10) has an interfacial barrier film (46) containing a nitride compound between the electrode (24 26) and the glass layer (14, 16). In one embodiment the capacitive sensor, (10) is an inertial sensor having a sensing element (20) hingedly mounted to a frame (18) which is anodically bonded to the glass layer (14 16). The sensing electrode (24, 26) is then located on a surface of the glass layer (14 16) facing the sensing element (20). The sensing element (20) and the frame (18) are preferably made of silicon and the interfacial film (46) is preferably silicon nitride.
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 24, 1995 and granted November 9, 1999. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended March 24, 2015.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by March 24, 2017.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.