Optical processing method and apparatus for carrying out the same
CA 2149949 C · Owner: Izumo, Masao · Inventors: Zumoto, Nobuyuki; Nakatani, Hajime; Izumo, Masao
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An optical processing apparatus for processing optically a workpiece by using a light beam. The apparatus is capable of automatically adjusting an imaging magnification to a predetermined value and at the same time maintaining constant an imaging magnification regardless of exchange of masks and workpiece and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system for generating a light beam for illuminating a mask having a predetermined pattern, an imaging lens for copying a pattern image of the mask onto a workpiece a mask-moving, mechanism for moving the mask in a direction perpendicular to an optical axis of the imaging …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed May 23, 1995 and granted October 27, 1998. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended May 23, 2015.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by May 23, 2017.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.