Opto-electronic hybrid integration platform, optical sub-module, opto-electronic hybrid integration circuit, and process for fabricating platform

Abstract From the Canadian patent

An opto-electronic hybrid integrated circuit of the present invention satisfy a low-loss optical waveguide function an optical bench function and a high-frequency electrical wiring function. The circuit includes a substrate such as a silicon substrate a dielectric optical waveguide part arranged in a recess of the substrate and an optical device mounting part formed on a protrusion of the substrate. An electrical wiring part is disposed on the dielectric layer. The optical device is mounted on the substrate. An optical sub-module includes the optical device which is possible to mount on the substrate.