Extended lifetime collimator
CA 2125180 A1 · Owner: Materials Research Corporation · Inventors: Hurwitt, Steven D.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
An improved extended lifetime collimator (11) for cathode sputtering has a plurality of passages (20) which taper longitudinally from a target (13) side of the collimator to a wafer (14) side of the collimator. This longitudinal tapering reduces the adverse effects on collimator useful life and wafer deposition rate which are generally caused by the accumulation of sputtered particles on exposed surfaces on the target side of the collimator (11). Compared to prior collimators this collimator (11) may be used to, sputter coat a greater number of wafers (14) before replacement or cleaning is necessary, thereby enhancing throughput capability.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed December 29, 1992. No grant is recorded for it in Canada; had it been granted, its 20-year term would have ended December 29, 2012.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by December 29, 2014.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.