Device fabrication entailing synchrotron radiation
CA 2121608 C · Owner: Macdowell, Alastair Angus · Inventors: Macdowell, Alastair Angus; White, Donald Lawrence
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
Devices built to design rules ~0.25µm are pattern delineated by use of synchrotron-emitted x-ray radiation using a condenser which collects over a collection arc of at lease 100 mrad. Condenser designs provide for processing of, collected radiation to tailor characteristics such as direction and divergence. Pattern, delineation by proximity printing as well as by projection printing is described. Forms of projection printing include reduction ringfield projection as by 5:1 mask:image reduction.
Read the whole patent
Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed April 19, 1994 and granted January 18, 2000. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended April 19, 2014.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by April 19, 2016.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
Timeline From CIPO dates
Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.