Method and structure for electronically measuring beam parameters
CA 2117119 C · Owner: Etec System, Inc. · Inventors: Prior, Richard W.
Overview
Its claims, description and drawings are in the Canadian Patents Database.
Open the CIPO recordAbstract From the Canadian patent
A method of electronically measuring parameters of an beam in a raster scan system includes the steps of choosing a predetermined pixel to be calibrated moving a, grid adjacent this pixel, strobing the beam incrementally, moving the beam toward an axis of the grid and, integrating the signal resulting from the beam as the beam moves toward the axis. The steps of strobing the beam incrementally moving the beam, and integrating the signal are repeated until the beam crosses the axis. The value of the accumulated signals, provided for example by a charge amplifier, is used to determine the relative position of the axis of the grid. The value of the accumulated signals associated with another …
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Listed from its CIPO record in Patent Yard's archive of Canadian patents past their term. Its claims, description and drawings are in the CIPO record and on Google Patents, and the Claude kit works from them.
Why it's free to use
- Filed March 7, 1994 and granted February 29, 2000. A Canadian patent filed from October 1, 1989 lasts 20 years from filing, so its term ended March 7, 2014.
- A certificate of supplementary protection adds at most two years for a drug, so even that would have ended by March 7, 2016.
- We check Canadian rights only. A patent in its family in another country could still be in force: check its family on Google Patents.
Timeline
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Sources & verification
Official CIPO records
Everything on this page comes from the CIPO record linked above. Contains information licensed under the Open Government Licence – Canada.