Pin-type light receiving device, manufacture of the pin-type light receiving device and optoelectronic integrated circuit

Abstract From the Canadian patent

In a optoelectronic integrated circuit a pin-type, light receiving device and an electronic circuit device are electrically connected to each other and monolithically integrated on a semiconductor substrate. In the pin-type light receiving device an n-type, semiconductor layer, an i-type semiconductor layer and a, p-type semiconductor layer are sequentially formed on the semiconductor substrate and sequentially formed into mesa shapes. The first mesa is constituted by the p-type semiconductor layer, and the second mesa is constituted by the i-type semiconductor layer. The boundary surface between the first and second mesas is formed to match the junction surface between the p-type …